AIR QUALITY STANDARDS |
|
| Cleanroom Air Quality Standards | |||||
|---|---|---|---|---|---|
| Copper Corrosion |
Silver Corrosion |
||||
| Air Quality Classification |
Reactivity Rate (Angstroms / 30 days) |
Air Quality Classification |
Reactivity Rate (Angstroms / 30 days) |
||
| C1 |
Pure |
< 90 |
S1 |
Pure |
< 40 |
| C2 |
Clean |
< 150 |
S2 |
Clean |
< 100 |
| C3 |
Moderate |
< 250 |
S3 |
Moderate |
< 200 |
| C4 |
Harsh |
< 350 |
S4 |
Harsh |
< 300 |
| C5 |
Severe |
> 350 |
S5 |
Severe |
> 300 |
| The purpose of the Air Quality Standards is to classify cleanroom environments according to the severity of copper and silver sensor corrosion. The standard identifies five Air Quality Classifications — pure, clean, moderate, harsh, and severe — based on the rate of corrosion (measured in Angstroms) over a period of 30 days. The Air Quality Classifications, defined as follows, characterize the environment as to its possible effects on process reliability. Pure: AMC does not pose a measurable threat to processes. Clean: AMC is measurable, but does not pose an immediate threat to processes. Moderate: AMC in slightly above the levels considered acceptable for reliable operation. Harsh: AMC is above the levels considered acceptable for reliable operation. Severe: AMC poses an immediate threat to reliable operations. |
